000 00275nam a22001337a 4500
020 _a9788131764756
082 _a621.381
100 _aLIU CHANG
245 _aFOUNDATIONS OF MEMS
250 _a2 ND
260 _aCHENNAI
_bPEARSON
_c2011
300 _a576P
942 _cBK
999 _c9404
_d9404