000
00272nam a22001337a 4500
020
_a
9788131764756
082
_a
621.381
100
_a
LIU CHANG
245
_a
FOUNDATIONS OF MEMS
250
_a
2ND
260
_a
NOIDA
_b
PEARSON
_c
2012
300
_a
576P
942
_c
BK
999
_c
9191
_d
9191